PRODUCTS
Motorized Stage Alignment Unit
Motorized Stage Alignment Unit(3-Axis)Correspond to 8°:ES3800
Spec
| CAD |
|
| RoHS | Supporting RoHS 10 substance |
| Product name | Motorized Stage Alignment Unit (3-Axis) Supporting 8° cut:ES3800 |
| For 8 degree cut | B type |
| Weight[kg] | 3.5 |
| Optical axis height [mm] | 145 |
| Accessory | Stage cable (D214-2-2E x 3) Mounting screw (Hex socket head bolt M6-12 x 8) |
| Travel distance X[mm] | 20 |
| Travel distance Y[mm] | 20 |
| Travel distance Z[mm] | 13 |
| Travel distance: Z[mm](Coarse motion) | ±6.5 |
| Travel distance: Z[mm](Fine motion) | ±0.3 |
| Travel distance: θx[±°] | 2.5 |
| Travel distance: θy[±°] | 2.5 |
| Travel distance: θz[±°] | 10 |
| Resolution : X[μm/Pulse](Full) |
1 |
| Resolution : X[μm/Pulse](MS1/20) |
0.05 |
| Resolution : Y[μm/Pulse](Full) |
1 |
| Resolution : Y[μm/Pulse](MS1/20) |
0.05 |
| Resolution : Z-Axis [μm/scale](Coarse motion) |
10 |
| Resolution : Z-Axis [μm/scale](Fine motion) |
0.5 |
| Resolution : θx[≒″/scale] |
29.3 |
| Resolution : θy[≒″/scale] |
27.8 |
| Resolution : θz[°/Pulse](Full) |
0.0045 |
| X | KXC06020-G |
| Y | KXC06020-G |
| Z | B10-60LN |
| θx | B51-60RN(Lower axis) |
| θy | B51-60RN(Upper axis) |
| θz | KGW06050-R |
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