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TEL:0120-789-446　FAX:0120-789-449

Motorized Stage Alignment Unit

Motorized Stage Alignment Unit(3-Axis)Correspond to 8°:ES3800

Model configuration/Option code

Dimensions

Spec

Product name	Motorized Stage Alignment Unit (3-Axis) Supporting 8° cut:ES3800
Product Explanation	Unit that incorporates a motorized stage on two linear XY axes and a rotating axis (θz) in the direction of the optical axis. The posture of the high-resolution manual stage (Z) and tilt direction (θxθy) can also be adjusted using the manual axis.

Option

For 8 degree cut

A type

B type

Travel distance X[mm]

Travel distance Y[mm]

Travel distance Z[mm]

Relevant product

Spec List

preview

Model	Product name	For 8 degree cut	Weight[kg]	Optical axis height [mm]	Accessory	Travel distance X[mm]	Travel distance Y[mm]	Travel distance Z[mm]	Travel distance: Z[mm](Coarse motion)	Travel distance: Z[mm](Fine motion)	Travel distance: θx[±°]	Travel distance: θy[±°]	Travel distance: θz[±°]	Resolution : X[μm/Pulse](Full)	Resolution : X[μm/Pulse](MS1/20)	Resolution : Y[μm/Pulse](Full)	Resolution : Y[μm/Pulse](MS1/20)	Resolution : Z-Axis [μm/scale](Coarse motion)	Resolution : Z-Axis [μm/scale](Fine motion)	Resolution : θx[≒″/scale]	Resolution : θy[≒″/scale]	Resolution : θz[°/Pulse](Full)	CAD	Qty	Estimate
ES3800-8A	Motorized Stage Alignment Unit (3-Axis) Supporting 8° cut:ES3800	A type	3.5	145	Stage cable (D214-2-2E x 3) Mounting screw (Hex socket head bolt M6-12 x 8)	20	20	13	±6.5	±0.3	2.5	2.5	10	1	0.05	1	0.05	10	0.5	29.3	27.8	0.0045
ES3800-8B	Motorized Stage Alignment Unit (3-Axis) Supporting 8° cut:ES3800	B type	3.5	145	Stage cable (D214-2-2E x 3) Mounting screw (Hex socket head bolt M6-12 x 8)	20	20	13	±6.5	±0.3	2.5	2.5	10	1	0.05	1	0.05	10	0.5	29.3	27.8	0.0045

SURUGA SEIKI Co,Ltd.