Model
Product name
Power supply
External Dimensions (Controller)
Weight (Controller)
Number of controlled axis
Motor control method
Alignment Software
Analog input for alignment
Communication interface
User interface
L/R type
External Dimensions (Stage)
Weight (Stage)
Travel distance X[mm]
Travel distance Y[mm]
Travel distance Z[mm]
Travel distance: θx[±deg]
Travel distance: θy[±deg]
Travel distance: θz[±deg]
Resolution:X[μm/Pulse]
Resolution:Y[μm/Pulse]
Resolution:Z[μm/Pulse]
Resolution:θx[°/Pulse](Full)
Resolution:θy[°/Pulse](Full)
Resolution:θz[°/Pulse](Full)
Accessory
Features
※
CAD
Qty
Estimate
EW31-L6
EW31-L6-XX 6-axis Controller & Stages Set(with Contact Sensor)(Left)
AC 100~240V +/- 10%、50/60Hz、最大650VA
External Dimensions: 430(W) x 462.3(D) x 231.5(H) mm(Including jut)
16.1kg
maximum 6 axes
Closed-loop control
XY alignment (FLAT), XYZ alignment (FOCUS), XYθZ alignment (ROTATE, LOOPBACK)
DC 0-10V, 4 channels
Ethernet for Host Controller PC Ethernet/RS232C/USB for external power meter
HDMI port for monitor output USB port for keyboard/mouse/touch-screen I/F
L type
306(W)×264(D)×201(H)㎜
6.9kg/unit
50
10
50
6
8
8
0.01
0.005
0.01
0.000128
0.000156
0.000167
・ Motor cable x 3 ・ Encoder cable x 3 ・ High resolution Motor cable x 3 ・ High resolution Encoder cable x 3 ・ Sensor cable x 6 ・ Power supply cable x 1 ・ Contact Sensor(L)for stage 1pc ・ Amplifier for contact sensor 1pc ・ mounting bolts with hexagon socket for stage( Nominal diameter M6 length 12 mm 4 pieces)]
EW31-L6 is equipped with a contact sensor to achieve contact sensing and surface alignment functions. Prevents damage to waveguides such as SiP and FA during alignment, and enables optimal automatic alignment. It is a combination of a 6-axis automatic stage unit on the left side (L) and a 6-axis controller It is also possible to create an arbitrary gap between FA and SiP by contact sensor. The software that supports loopback alignment installed in the EW50 is still installed. No additional stage upgrades are possible due to 6-axis controller.
1)* EW31-L6-XX: XX are regional models. 2) CAD data will be sent separately upon request. 3) The controller and stage are set up to be used in pairs. It cannot be used in other our standard stages. 4) We will contact you separately for the instruction manual.
EW31-R6
EW31-R6-XX 6-axis Controller & Stages Set(with Contact Sensor)(Right)
AC 100~240V +/- 10%、50/60Hz、最大650VA
External Dimensions: 430(W) x 462.3(D) x 231.5(H) mm(Including jut)
16.1kg
maximum 6 axes
Closed-loop control
XY alignment (FLAT), XYZ alignment (FOCUS), XYθZ alignment (ROTATE, LOOPBACK)
DC 0-10V, 4 channels
Ethernet for Host Controller PC Ethernet/RS232C/USB for external power meter
HDMI port for monitor output USB port for keyboard/mouse/touch-screen I/F
R type
306(W)×264(D)×201(H)㎜
6.9kg/unit
50
10
50
6
8
8
0.01
0.005
0.01
0.000128
0.000156
0.000167
・ Motor cable x 3 ・ Encoder cable x 3 ・ High resolution Motor cable x 3 ・ High resolution Encoder cable x 3 ・ Sensor cable x 6 ・ Power supply cable x 1 ・ Contact Sensor(R)for stage 1pc ・ Amplifier for contact sensor 1pc ・ mounting bolts with hexagon socket for stage( Nominal diameter M6 length 12 mm 4 pieces)]
EW31-R6 is equipped with a contact sensor to achieve contact sensing and surface alignment functions. Prevents damage to waveguides such as SiP and FA during alignment, and enables optimal automatic alignment. It is a combination of a 6-axis automatic stage unit on the right side (R) and a 6-axis controller It is also possible to create an arbitrary gap between FA and SiP by contact sensor. The software that supports loopback alignment installed in the EW50 is still installed. No additional stage upgrades are possible due to 6-axis controller.
1)* EW31-R6-XX: XX are regional models. 2) CAD data will be sent separately upon request. 3) The controller and stage are set up to be used in pairs. It cannot be used in other our standard stages. 4) We will contact you separately for the instruction manual.