PRODUCTS
Controller & Stage Set(with Contact Sensor)
EW31-L6/R6-XX
6-axis Controller & Stage Set(with Contact Sensor)
6-axis Controller & Stage Set(with Contact Sensor)
Spec
| CAD |
|
| RoHS | Supporting RoHS 10 substance |
| Product name | EW31-L6-XX 6-axis Controller & Stages Set(with Contact Sensor)（Left） |
| Power supply | AC 100～240V +/- 10%、50/60Hz、最大650VA |
| External Dimensions (Controller) | External Dimensions: 430(W) x 462.3(D) x 231.5(H) mm（Including jut） |
| Weight (Controller) | 16.1kg |
| Number of controlled axis | maximum 6 axes |
| Motor control method | Closed-loop control |
| Alignment Software | XY alignment (FLAT), XYZ alignment (FOCUS), XYθZ alignment (ROTATE, LOOPBACK) |
| Analog input for alignment | DC 0-10V, 4 channels |
| Communication interface | Ethernet for Host Controller PC Ethernet/RS232C/USB for external power meter |
| User interface | HDMI port for monitor output USB port for keyboard/mouse/touch-screen I/F |
| L/R type | L type |
| External Dimensions (Stage) | 306(W)×264(D)×201(H)㎜ |
| Weight (Stage) | 6.9kg/unit |
| Travel distance X[mm] | 50 |
| Travel distance Y[mm] | 10 |
| Travel distance Z[mm] | 50 |
| Travel distance: θx[±deg] | 6 |
| Travel distance: θy[±deg] | 8 |
| Travel distance: θz[±deg] | 8 |
| Resolution:X[μm/Pulse] | 0.01 |
| Resolution:Y[μm/Pulse] | 0.005 |
| Resolution:Z[μm/Pulse] | 0.01 |
| Resolution:θx[°/Pulse](Full) | 0.000128 |
| Resolution:θy[°/Pulse](Full) | 0.000156 |
| Resolution:θz[°/Pulse](Full) | 0.000167 |
| Accessory | ・ Motor cable x 3 ・ Encoder cable x 3 ・ High resolution Motor cable x 3 ・ High resolution Encoder cable x 3 ・ Sensor cable x 6 ・ Power supply cable x 1 ・ Contact Sensor（L）for stage 1pc ・ Amplifier for contact sensor 1pc ・ mounting bolts with hexagon socket for stage( Nominal diameter M6 length 12 mm 4 pieces)] |
| Features | EW31-L6 is equipped with a contact sensor to achieve contact sensing and surface alignment functions. Prevents damage to waveguides such as SiP and FA during alignment, and enables optimal automatic alignment. It is a combination of a 6-axis automatic stage unit on the left side (L) and a 6-axis controller It is also possible to create an arbitrary gap between FA and SiP by contact sensor. The software that supports loopback alignment installed in the EW50 is still installed. No additional stage upgrades are possible due to 6-axis controller. |
| ※ | 1)* EW31-L6-XX: XX are regional models. 2) CAD data will be sent separately upon request. 3) The controller and stage are set up to be used in pairs. It cannot be used in other our standard stages. 4) We will contact you separately for the instruction manual. |
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