Stage surface size [φmm] | φ60mm |
Travel distance | ±5.5° |
Load capacity[kgf] | 6 |
Travel mechanism | Ball screwφ6Lead1 |
Main material | Aluminum-Black alumite finishing |
Motor option | 5 Phase stepping motor |
MAX Speed [°/sec] | 64 |
Repeatability positioning accuracy [Within±°] | 0.003 |
Eccentricity[Withinμm] | No regulation |