
| Stage surface size [φmm] | □60mm|φ60mm |
| Travel distance | ±5.5° |
| Load capacity[kgf] | 6 |
| Travel mechanism | Ball screwφ6Lead1 |
| Main material | Aluminum-Black alumite finishing |
| Motor option | 2 Phase stepping motor|5 Phase stepping motor (Standard)|αSTEP (AZ Series) |
| MAX Speed [°/sec] | 47.8|63.8 |
| Repeatability positioning accuracy [Within±°] | 0.003 |