Stage surface size | 60×60mm |
Travel distance[mm] | 75 |
Load capacity[kgf] | 10 |
Guide | Linear Ball Guide |
Main material | Stainless steel -Electroless nickel plating |
MAX Speed (Horizontal) [mm/sec] | 25~100 |
Single axis accuracy specification Repeatability positioning accuracy [Within ±μm] | 0.5 |
Single axis accuracy specification Straightness[Withinμm] | 3 |