
| Stage surface size | 60×60mm |
| Travel distance[mm] | 20 |
| Load capacity[kgf] | 4.5 |
| Guide | Cross Roller Guide |
| Main material | Aluminum -Black alumite finishing |
| MAX Speed (Horizontal) [mm/sec] | 20 |
| Single axis accuracy specification Repeatability positioning accuracy [Within ±μm] | 0.2 |
| Single axis accuracy specification Straightness[Withinμm] | 3 |