Stage surface size | 60×60mm |
Travel distance: Upper axis[±°] | 10|6|8 |
Travel distance: Lower axis[±°] | 5|6|8 |
Load capacity[kgf] | 4.5 |
Travel mechanism | Worm gear |
Main material | Aluminum-Black alumite finishing |
Height of center rotation | 100±0.4mm|50±0.4mm|75±0.4mm |
Motor option | 5 Phase stepping motor (High resolution)|5 Phase stepping motor (Standard)|Motor for EtherCAT|Servo motor_J4 (Mitsubishi Electric corporation)|Servo motor_MINAS A6 (Panasonic)|αSTEP (AR Series)|αSTEP (AZ Series) |
MAX Speed Upper Axis [°/sec] | 12.5|16|22.5|25|32|37.5|45|48|67.5 |
MAX Speed Under Axis [°/sec] | 10|12.5|16|20|25|30|32|37.5|48 |
Repeatability positioning accuracy [Within±°] | 0.003 |