Stage surface size | 70×70mm |
Travel distance: Upper axis[±°] | 4|5 |
Travel distance: Lower axis[±°] | 3|4 |
Load capacity[kgf] | 4 |
Travel mechanism | Ball screw φ6 Lead1 |
Main material | Aluminum-White alumite processing |
Height of center rotation | 70±0.4mm|96±0.4mm |
Motor option | 5 Phase stepping motor |
MAX Speed Upper Axis [°/sec] | 17|23 |
MAX Speed Under Axis [°/sec] | 13|17 |
Repeatability positioning accuracy [Within±°] | 0.003 |