Stage surface size | 60×60mm |
Travel distance[±°] | 10|5|6|8 |
Load capacity[kgf] | 5 |
Travel mechanism | Worm gear |
Main material | Aluminum-Black alumite finishing |
Height of center rotation | 100±0.2mm|125±0.2mm|50±0.2mm|75±0.2mm |
Motor option | 5 Phase stepping motor (High resolution)|5 Phase stepping motor (Standard)|Motor for EtherCAT|Servo motor_J4 (Mitsubishi Electric corporation)|Servo motor_MINAS A6 (Panasonic)|αSTEP (AR Series)|αSTEP (AZ Series) |
Repeatability positioning accuracy [Within±°] | 0.003 |