Stage surface size | 70×70mm |
Travel distance[±°] | 3|4|5 |
Load capacity[kgf] | 5 |
Travel mechanism | Ball screw φ6 Lead1 |
Main material | Aluminum-white alumite finishing |
Height of center rotation | 122±0.2mm|70±0.2mm|96±0.2mm |
Motor option | 2 Phase stepping motor|5 Phase stepping motor (High resolution)|5 Phase stepping motor (Standard)|αSTEP (AZ Series) |
Repeatability positioning accuracy [Within±°] | 0.003 |