Stage surface size | 60×60mm |
Travel distance[±°] | 4|5|5.5|8.5 |
Load capacity[kgf] | 5 |
Travel mechanism | Ball screw φ6 Lead1 |
Main material | Aluminum-Black alumite finishing |
Height of center rotation | 100±0.2mm|125±0.2mm|50±0.2mm|75±0.2mm |
Motor option | 2 Phase stepping motor|5 Phase stepping motor (High resolution)|5 Phase stepping motor (Standard)|αSTEP (AZ Series) |
Repeatability positioning accuracy [Within±°] | 0.001 |