Stage surface size | 70×70mm |
Travel distance[±°] | 5|7|9 |
Load capacity[kgf] | 5 |
Travel mechanism | Worm gear |
Main material | Aluminum-White alumite processing |
Height of center rotation | 122±0.2mm|70±0.2mm|96±0.2mm |
Motor option | 5 Phase stepping motor □28mm|5 Phase stepping motor □42mm |
Repeatability positioning accuracy [Within±°] | 0.003 |