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Stage Controller set
EW50-L6/R6-XX 12-Axis alignment Controller & Stage Set
Spec
| CAD |
|
| RoHS | Supporting RoHS 10 substance |
| Product name | EW50-R6-XX 12-Axis alignment Controller & Stage Set（Right） |
| (Controller)Power supply | AC 100～240V +/- 10%、50/60Hz、Max650VA |
| (Controller)External Dimensions | External Dimensions: 430(W) x 462.3(D) x 231.5(H) mm（Including jut） |
| (Controller)Weight | 17.5kg |
| (Controller)Number of controlled axis | maximum 12 axes |
| (Controller)Motor control method | Closed-loop control |
| (Controller)Alignment Software | Single, XY Flat, XYZ Focus, and XYθZ Rotation |
| (Controller)Analog input for alignment | DC 0-10V, 2 channels |
| (Controller)Communication interface | Ethernet for Host Controller PC Ethernet/RS232C/USB for external power meter |
| (Controller)User interface | HDMI port for monitor output USB port for keyboard/mouse/touch-screen I/F |
| L/R type | L type |
| (Stage)External Dimensions | 306(W)×264(D)×201(H)㎜ |
| (Stage)Weight | 6.9 kg/unit |
| (Stage)Travel distance X[mm] | 50 |
| (Stage)Travel distance Y[mm] | 10 |
| (Stage)Travel distance Z[mm] | 50 |
| (Stage)Travel distance: θx[±deg] | 6 |
| (Stage)Travel distance: θy[±deg] | 8 |
| (Stage)Travel distance: θz[±deg] | 8 |
| (Stage)Resolution:X[μm/Pulse] | 0.01 |
| (Stage)Resolution:Y[μm/Pulse] | 0.005 |
| (Stage)Resolution:Z[μm/Pulse] | 0.01 |
| (Stage)Resolution:θx[°/Pulse](Full) | 0.000128 |
| (Stage)Resolution:θy[°/Pulse](Full) | 0.000156 |
| (Stage)Resolution:θz[°/Pulse](Full) | 0.000167 |
| Accessory | ・ Motor cable x 3 ・ Encoder cable x 3 ・ High resolution Motor cable x 3 ・ High resolution Encoder cable x 3 ・ Sensor cable x 6 ・ Power supply cable x 1 ・mounting bolts with hexagon socket for stage ( Nominal diameter M6 length 12 mm 8 pieces) |
| Features | It supports loopback alignment for SiP, etc., has the same basic performance as the EW series, and combines a 12-axis controller with a 6-axis stage on the right side. The controller of EW50-R6 has a 12-axis motor driver, so you can add a left side 6 axis stage. |
| ※ | 1)* EW50-R6-XX: XX are regional models 2) CAD data will be sent separately upon request. 3) The controller and stage are set up to be used in pairs. It cannot be used in other our standard stages. 4) We will contact you separately for the instruction manual. |
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