PRODUCTS
Motorized Stage Alignment Unit
Motorized Stage Alignment Unit(6-Axis):ES6202/ES6212/ES6222
Spec
| CAD |
|
| RoHS | Supporting RoHS 10 substance |
| Product name | Motorized Stage Alignment Unit (6-Axis):E6222 |
| Stroke type | X:70mm/Y:20mm/Z:100mm/θxyz:±8° |
| L/R type | Left type |
| Weight[kg] | 7.9 |
| Optical axis height [mm] | 214 |
| Load capacity[kgf] | 0.3 |
| Accessory | Stage cable (D214-2-2E 4 pcs/D214-1-2E 2 pcs) Mounting screw (Hexagon socket head bolt M6-12 4 pcs) |
| Travel distance X[mm] | 70 |
| Travel distance Y[mm] | 20 |
| Travel distance Z[mm] | 100 |
| Travel distance θx[±°] | 8 |
| Travel distance θy[±°] | 8 |
| Travel distance θz[±°] | 8 |
| Resolution X[μm/Pulse](Full) | 1 |
| Resolution X[μm/Pulse](MS1/20) | 0.05 |
| Resolution Y[μm/Pulse](Full) | 1 |
| Resolution Y[μm/Pulse](MS1/20) | 0.05 |
| Resolution Z[μm/Pulse](Full) | 1 |
| Resolution Z[μm/Pulse](MS1/20) | 0.05 |
| Resolution θx[°/Pulse](Full) | 0.003 |
| Resolution θx[°/Pulse](Half) | 0.0015 |
| Resolution θy[°/Pulse](Full) | 0.0032 |
| Resolution θy[°/Pulse](Half) | 0.0016 |
| Resolution θz[°/Pulse](Full) | 0.0032 |
| Resolution θz[°/Pulse](Half) | 0.0016 |
| MAX speed X[mm/sec] | 10 |
| MAX speed Y[mm/sec] | 20 |
| MAX speed Z[mm/sec] | 10 |
| MAX speed θx[°/sec] | 15 |
| MAX speed θy[°/sec] | 16 |
| MAX speed θz[°/sec] | 16 |
| Repeatability positioning accuracy X[±μm] | 0.2 |
| Repeatability positioning accuracy Y[±μm] | 0.2 |
| Repeatability positioning accuracy Z[±μm] | 0.2 |
| Repeatability positioning accuracy θx[±°] | 0.005 |
| Repeatability positioning accuracy θy[±°] | 0.003 |
| Repeatability positioning accuracy θz[±°] | 0.003 |
| Configuration X | KS102-70LG |
| Configuration Y | KXC06020-G |
| Configuration Z | KS102-100RG |
| Configuration θx | KGW04040T-LC |
| Configuration θy | KGW06075T-RC |
| Configuration θz | KGW06075T-LC |
| ※ | The repeatability positioning accuracy is tested in a single-axis state. |
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