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Motorized Stage Alignment Unit
Motorized Stage Alignment Unit(4-Axis):ES4001
Spec
| CAD | |
| RoHS | Supporting RoHS 10 substance |
| Product name | Motorized Stage Alignment Unit (4-Axis):ES4001 |
| Overhang option | Overhang type |
| Tilt Stage type | Outer tilt |
| L/R type | Left type |
| Weight[kg] | 3.5 |
| Optical axis height [mm] | 145 |
| Load capacity[kgf] | 0.3 |
| Accessory | Stage cable (D214-2-2E x 4) Mounting screw (Hex socket head bolt M6-12 x 4) |
| Travel distance X[mm] | 20 |
| Travel distance Y[mm] | 20 |
| Travel distance Z[mm] | 20 |
| Travel distance θx[±°] | 2.5 |
| Travel distance θy[±°] | 2.5 |
| Travel distance θz[±°] | 10 |
| Resolution X[μm/Pulse](Full) | 1 |
| Resolution X[μm/Pulse](MS1/20) | 0.05 |
| Resolution Y[μm/Pulse](Full) | 1 |
| Resolution Y[μm/Pulse](MS1/20) | 0.05 |
| Resolution Z[μm/Pulse](Full) | 1 |
| Resolution Z[μm/Pulse](MS1/20) | 0.05 |
| Resolution θx[≒″/scale] | 29.3 |
| Resolution θy[≒″/scale] | 27.8 |
| Resolution θz[°/Pulse](Full) | 0.0045 |
| Resolution θz[°/Pulse](Half) | 0.00225 |
| MAX speed X[mm/sec] | 20 |
| MAX speed Y[mm/sec] | 20 |
| MAX speed Z[mm/sec] | 20 |
| MAX speed θz[°/sec] | 22.5 |
| Repeatability positioning accuracy X[±μm] | 0.2 |
| Repeatability positioning accuracy Y[±μm] | 0.2 |
| Repeatability positioning accuracy Z[±μm] | 0.2 |
| Repeatability positioning accuracy θz[±°] | 0.003 |
| Configuration X | KXC06020-G |
| Configuration Y | KXC06020-G |
| Configuration Z | KXC06020-G |
| Configuration θx | B51-60LN(θxy integrated type) |
| Configuration θy | B51-60LN(θxy integrated type) |
| Configuration θz | KGW06050T-LC |
| ※ | The repeatability positioning accuracy is tested in a single-axis state. |
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