PRODUCTS
Manual Stage Alignment Unit
Manual Stage Alignment Unit
(6-Axis):E2200B
(6-Axis):E2200B
Spec
| CAD |
|
| RoHS | Supporting RoHS 10 substance |
| Product name | Manual Stage Alignment Unit (6-Axis):E2200B |
| Overhang option | None |
| L/R type | Right type |
| Weight[kg] | 2.5 |
| Optical axis height [mm] | 130 |
| Accessory | Mounting screw (Hexagon socket bolts M6-12 x 4) |
| X-Axis | B10-60RN |
| Y-Axis | B30-60RK |
| Z-Axis | B10-60LN |
| θx Axis | B51-60RN(θxy integrated type) |
| θy Axis | B51-60RN(θxy integrated type) |
| θz Axis | B58-60UCR |
| Travel distance X[±mm](Coarse motion) | 6.5 |
| Travel distance X[±mm](Fine motion) | 0.3 |
| Travel distance Y[±mm](Coarse motion) | 6.5 |
| Travel distance Y[±mm](Fine motion) | 0.3 |
| Travel distance Z[±mm](Coarse motion) | 6.5 |
| Travel distance Z[±mm](Fine motion) | 0.3 |
| Travel distanceθx[±°] | 2.5 |
| Travel distanceθy[±°] | 2.5 |
| Travel distanceθz [±°] | 4 |
| Resolution : X [μm/scale](Coarse motion) |
10 |
| Resolution : X [μm/scale](Fine motion) |
0.5 |
| Resolution : Y-Axis [μm/scale](Coarse motion) |
10 |
| Resolution : Y-Axis [μm/scale](Fine motion) |
0.5 |
| Resolution : Z-Axis [μm/scale](Coarse motion) |
10 |
| Resolution : Z-Axis [μm/scale](Fine motion) |
0.5 |
| Resolution : θx[″/scale] |
29.3 |
| Resolution : θy[″/scale] |
27.8 |
| Resolution : θz[″/scale] |
33 |
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