
| CAD | |
| RoHS | Supporting RoHS 10 substance |
| Stage surface size[mm] | 50×50 |
| Travel distance[mm] | 13 |
| Travel distance | XYZ:±6.5mm |
| Guide | Linear Ball Guide |
| body color | Silver |
| Main material | Stainless steel - electroless nickel plating |
| Load capacity[kgf] | 5 |
| Load capacity[N] | 49 |
| Feeding type : Micrometer head |
Micrometer(Standard) (P=0.5mm) |
| Feeding position | Center |
| Operating position | Opposite attached |
| Clamp method | Standard |
| Grease specification | Fomblin YVAC2 (vacuum grease) |
| Micrometer minimum reading [μm/scale] |
10 |
| Single axis accuracy specification :Travel accuarcy: Straightness[Within μm] |
3 |
| Single axis accuracy specification Travel accuarcy: Pitching [Within ″] |
40 |
| Single axis accuracy specification :Travel accuarcy: Yawing [Within ″] |
20 |
| Motion vertical degree[Within μm] | 35 |
| Allowable load for moment: Pitch[N・m] | 4.5 |
| Allowable load for moment: Yaw [N・m] | 5.4 |
| Allowable load for moment: Yaw[N・m] | 4.5 |
| Moment stiffness: Pitch[″/N・cm] | 0.91 |
| Moment stiffness: Yaw [″/N・cm] | 0.43 |
| Moment stiffness: Roll[″/N・cm] | 0.86 |
| Vertical degree[Withinμm] | 95 |
| Weight[kg] | 0.94 |
| Hexagon socket bolt | M3-10[4pcs] |