| Model |
Product name |
Power supply |
External Dimensions (Controller) |
Weight (Controller) |
Number of controlled axis |
Motor control method |
Alignment Software |
Analog input for alignment |
Communication interface |
User interface |
L/R type |
External Dimensions (Stage) |
Weight (Stage) |
Travel distance X[mm] |
Travel distance Y[mm] |
Travel distance Z[mm] |
Travel distance: θx[±deg] |
Travel distance: θy[±deg] |
Travel distance: θz[±deg] |
Resolution:X[μm/Pulse] |
Resolution:Y[μm/Pulse] |
Resolution:Z[μm/Pulse] |
Resolution:θx[°/Pulse](Full) |
Resolution:θy[°/Pulse](Full) |
Resolution:θz[°/Pulse](Full) |
Accessory |
Features |
※ |
CAD |
Qty |
Estimate |
|
EW30-L6 |
EW30-L6-XX
6-Axis alignment Controller & Stage Set（Left） |
AC 100～240V +/- 10%、50/60Hz、Max650VA |
External Dimensions: 430(W) x 462.3(D) x 231.5(H) mm（Including jut） |
15.7kg |
maximum 6 axes |
Closed-loop control |
Single, XY Flat, XYZ Focus, and XYθZ Rotation |
DC 0-10V, 2 channels |
Ethernet for Host Controller PC
Ethernet/RS232C/USB for external power meter |
HDMI port for monitor output
USB port for keyboard/mouse/touch-screen I/F |
L type |
306（W）×264（D）×201（H）㎜ |
6.9 kg/unit |
50 |
10 |
50 |
6 |
8 |
8 |
0.01 |
0.005 |
0.01 |
0.000128 |
0.000156 |
0.000167 |
・ Motor cable x 3
・ Encoder cable x 3
・ High resolution Motor cable x 3
・ High resolution Encoder cable x 3
・ Sensor cable x 6
・ Power supply cable x 1
・mounting bolts with hexagon socket for stage
( Nominal diameter M6 length 12 mm 4 pieces) |
It supports loopback alignment for SiP, etc., has the same basic performance as the EW series, and combines a 6-axis controller with a 6-axis stage on the left side.The controller of EW30-L6 only has a 6-axis motor driver, so it is not possible to add a right-side stage. |
1)* EW30-L6-XX: XX are regional models
2) CAD data will be sent separately upon request.
3) The controller and stage are set up to be used in pairs. It cannot be used in other our standard stages.
4) We will contact you separately for the instruction manual. |
|
|
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|
EW30-R6 |
EW30-R6-XX
6-Axis alignment Controller & Stage Set（Right） |
AC 100～240V +/- 10%、50/60Hz、Max650VA |
External Dimensions: 430(W) x 462.3(D) x 231.5(H) mm（Including jut） |
15.7kg |
maximum 6 axes |
Closed-loop control |
Single, XY Flat, XYZ Focus, and XYθZ Rotation |
DC 0-10V, 2 channels |
Ethernet for Host Controller PC
Ethernet/RS232C/USB for external power meter |
HDMI port for monitor output
USB port for keyboard/mouse/touch-screen I/F |
R type |
306（W）×264（D）×201（H）㎜ |
6.9 kg/unit |
50 |
10 |
50 |
6 |
8 |
8 |
0.01 |
0.005 |
0.01 |
0.000128 |
0.000156 |
0.000167 |
・ Motor cable x 3
・ Encoder cable x 3
・ High resolution Motor cable x 3
・ High resolution Encoder cable x 3
・ Sensor cable x 6
・ Power supply cable x 1
・mounting bolts with hexagon socket for stage
( Nominal diameter M6 length 12 mm 4 pieces) |
It supports loopback alignment for SiP, etc., has the same basic performance as the EW series, and combines a 6-axis controller with a 6-axis stage on the right side.The controller of EW30-R6 only has a 6-axis motor driver, so it is not possible to add a left-side stage. |
1)* EW30-R6-XX: XX are regional models
2) CAD data will be sent separately upon request.
3) The controller and stage are set up to be used in pairs. It cannot be used in other our standard stages.
4) We will contact you separately for the instruction manual. |
|
|
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