Model
Product name
Power supply
External Dimensions (Controller)
Weight (Controller)
Number of controlled axis
Motor control method
Alignment Software
Analog input for alignment
Communication interface
User interface
L/R type
External Dimensions (Stage)
Weight (Stage)
Travel distance X[mm]
Travel distance Y[mm]
Travel distance Z[mm]
Travel distance: θx[±deg]
Travel distance: θy[±deg]
Travel distance: θz[±deg]
Resolution:X[μm/Pulse]
Resolution:Y[μm/Pulse]
Resolution:Z[μm/Pulse]
Resolution:θx[°/Pulse](Full)
Resolution:θy[°/Pulse](Full)
Resolution:θz[°/Pulse](Full)
Accessory
Features
※
CAD
Qty
Estimate
EW51-L6
EW51-L6-XX
AC 100～240V +/- 10%、50/60Hz、Max650VA
External Dimensions: 430(W) x 462.3(D) x 231.5(H) mm（Including jut）
17.4kg
maximum 12 axes
Closed-loop control
XY alignment (FLAT), XYZ alignment (FOCUS), XYθZ alignment (ROTATE, LOOPBACK)
DC 0-10V, 4 channels
Ethernet for Host Controller PC
HDMI port for monitor output
L type
300.4(W)×264(D)×206(H)㎜（Including jut）
6.7kg/unit
50
10
50
6
8
8
0.01
0.005
0.01
0.000128
0.000156
0.000167
・ Motor cable x 3
EW51 is equipped with a contact sensor to achieve contact sensing and surface alignment functions. This product is a combination of a 6-axis automatic stage unit on the left and right sides and a 12-axis controller that can optimally automatically align to prevent damage to waveguides such as SiP and FA during alignment.
1)* EW51-L6-XX: XX are regional models.
EW51-R6
EW51-R6-XX
AC 100～240V +/- 10%、50/60Hz、最大650VA
External Dimensions: 430(W) x 462.3(D) x 231.5(H) mm（Including jut）
17.4kg
maximum 12 axes
Closed-loop control
XY alignment (FLAT), XYZ alignment (FOCUS), XYθZ alignment (ROTATE, LOOPBACK)
DC 0-10V, 4 channels
Ethernet for Host Controller PC
HDMI port for monitor output
R type
300.4(W)×264(D)×206(H)㎜（Including jut）
6.7kg/unit
50
10
50
6
8
8
0.01
0.005
0.01
0.000128
0.000156
0.000167
・ Motor cable x 3
EW51 is equipped with a contact sensor to achieve contact sensing and surface alignment functions. This product is a combination of a 6-axis automatic stage unit on the left and right sides and a 12-axis controller that can optimally automatically align to prevent damage to waveguides such as SiP and FA during alignment.
1)* EW51-R6-XX: XX are regional models.
