Model |
Product name |
Travel distance X-Axis[mm] |
Travel distance Y-Axis[mm] |
Travel distance: Z-axis (optical axis) [mm] |
Travel distance:θx-Axis[±°] |
Travel distance:θy-Axis[±°] |
Travel distance:θz-Axis[±°] |
Resolution: X-Axis [μm/scale](Coarse motion) |
Resolution: X-Axis [μm/scale](Fine motion) |
Resolution: Y-Axis [μm/scale](Coarse motion) |
Resolution: Y-Axis [μm/scale](Fine motion) |
Resolution: Z-Axis [μm/scale](Coarse motion) |
Resolution: Z-Axis [μm/scale](Fine motion) |
Resolution:θx-Axis [″/scale] |
Resolution:θy-Axis [″/scale] |
Resolution:θz-Axis [″/scale] |
※ |
CAD |
Qty |
Estimate |