SURUGA SEIKI CO., LTD.

PRODUCTS

TEL:0120-789-446　FAX:0120-789-449

TEL:0120-789-446　FAX:0120-789-449

Motorized Stage Alignment Unit

Motorized Stage Alignment Unit(6-Axis)
:ES6702

Dimensions

Spec

Product name	Motorized Stage Alignment Unit (6-Axis) :E6702
Product Explanation	Unit that incorporates a motorized stage on the 3 linear XYZ axes and the 3 swing axes θxθyθz.

Option

L/R type

Left type

Right type

Sensor voltage

5V-24V

Travel distance X[mm]

Travel distance Y[mm]

Travel distance Z[mm]

Relevant product

Model	Product name	L/R type	Sensor voltage	Weight[kg]	Optical axis height [mm]	Accessory	Travel distance X[mm]	Travel distance Y[mm]	Travel distance Z[mm]	Travel distance: θx[±°]	Travel distance: θy[±°]	Travel distance: θz[±°]	Resolution : X[μm/Pulse](Full)	Resolution : X[μm/Pulse](MS1/20)	Resolution : Y[μm/Pulse](Full)	Resolution : Y[μm/Pulse](MS1/10)	Resolution : Z[μm/Pulse](Full)	Resolution : Z[μm/Pulse](MS1/20)	Resolution : θx[°/Pulse](Full)	Resolution : θy[°/Pulse](Full)	Resolution : θz[°/Pulse](Full)	CAD	Qty	Estimate
ES6702-L	Motorized Stage Alignment Unit (6-Axis) :E6702	Left type	5V-24V specification	6.7	206	Stage cable (D214-2-2E x 6) Mounting screw (Hexagon socket head bolt M6-12 x 4)	50	10	50	6	8	8	1	0.05	0.5	0.05	1	0.05	0.002466	0.003	0.0032
ES6702-R	Motorized Stage Alignment Unit (6-Axis) :E6702	Right type	5V-24V specification	6.7	206	Stage cable (D214-2-2E x 6) Mounting screw (Hexagon socket head bolt M6-12 x 4)	50	10	50	6	8	8	1	0.05	0.5	0.05	1	0.05	0.002466	0.003	0.0032

SURUGA SEIKI Co,Ltd.