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TEL:0120-789-446　FAX:0120-789-449

Motorized Stage Alignment Unit

【End of production】Motorized stage Alignment unit(6axis)Upper free type
:ES6701

Model configuration/Option code

Dimensions

Spec

Product name	Motorized Stage Alignment Unit (6-Axis) :E6701
Product Explanation	Unit that incorporates a motorized stage on the 3 linear XYZ axes and the 3 swing axes θxθyθz.

Option

L/R type

Left type

Right type

Travel distance X[mm]

Travel distance Y[mm]

Travel distance Z[mm]

Relevant product

Spec List

preview

Model	Product name	L/R type	Weight[kg]	Optical axis height [mm]	Accessory	Travel distance X[mm]	Travel distance Y[mm]	Travel distance Z[mm]	Travel distance: θx[±°]	Travel distance: θy[±°]	Travel distance: θz[±°]	Resolution : X[μm/Pulse](Full)	Resolution : X[μm/Pulse](MS1/20)	Resolution : Y[μm/Pulse](Full)	Resolution : Y[μm/Pulse](MS1/10)	Resolution : Z[μm/Pulse](Full)	Resolution : Z[μm/Pulse](MS1/20)	Resolution : θx[°/Pulse](Full)	Resolution : θy[°/Pulse](Full)	Resolution : θz[°/Pulse](Full)	CAD	Qty	Estimate
ES6701-L	Motorized Stage Alignment Unit (6-Axis) :E6701	Left type	6.7	206	Stage cable (D214-2-2E x 6) Mounting screw (Hexagon socket head bolt M6-12 x 4)	50	10	50	6	8	8	1	0.05	0.5	0.05	1	0.05	0.002466	0.003	0.0032
ES6701-R	Motorized Stage Alignment Unit (6-Axis) :E6701	Right type	6.7	206	Stage cable (D214-2-2E x 6) Mounting screw (Hexagon socket head bolt M6-12 x 4)	50	10	50	6	8	8	1	0.05	0.5	0.05	1	0.05	0.002466	0.003	0.0032

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