Motorized Stage Alignment Unit
【End of production】Motorized stage Alignment unit(6axis):ES6201/ES6211/ES6221
Model configuration/Option code
Dimensions
Spec
Product nameMotorized Stage Alignment Unit
(6-Axis):E6201|Motorized Stage Alignment Unit
(6-Axis):E6211|Motorized Stage Alignment Unit
(6-Axis):E6221
Product ExplanationUnit that incorporates a motorized stage on the 3 linear XYZ axes and the 3 swing axes θxθyθz.
Option
Stroke type
L/R type
Travel distance X[mm]
Travel distance Y[mm]
Travel distance Z[mm]
Relevant product
Spec List
ES6201-L Motorized Stage Alignment Unit
(6-Axis):E6201
X:30mm/Y:20mm/Z:70mm/θxyz:±8° Left type 7.2 214 Stage cable
(D214-2-2E 4 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
30 20 70 8 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 0.0032 2D 3D
ES6201-R Motorized Stage Alignment Unit
(6-Axis):E6201
X:30mm/Y:20mm/Z:70mm/θxyz:±8° Right type 7.2 214 Stage cable
(D214-2-2E 4 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
30 20 70 8 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 0.0032 2D 3D
ES6211-L Motorized Stage Alignment Unit
(6-Axis):E6211
X:70mm/Y:20mm/Z:70mm/θxyz:±8° Left type 7.6 214 Stage cable
(D214-2-2E 4 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
70 20 70 8 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 0.0032 2D 3D
ES6211-R Motorized Stage Alignment Unit
(6-Axis):E6211
X:70mm/Y:20mm/Z:70mm/θxyz:±8° Right type 7.6 214 Stage cable
(D214-2-2E 4 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
70 20 70 8 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 0.0032 2D 3D
ES6221-L Motorized Stage Alignment Unit
(6-Axis):E6221
X:70mm/Y:20mm/Z:100mm/θxyz:±8° Left type 7.9 214 Stage cable
(D214-2-2E 4 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
70 20 100 8 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 0.0032 2D 3D