Motorized Stage Alignment Unit
Motorized Stage Alignment Unit(5-Axis):ES5202/ES5212/ES5222
Model configuration/Option code
Dimensions
Spec
Product nameMotorized Stage Alignment Unit
(5-Axis):E5202|Motorized Stage Alignment Unit
(5-Axis):E5212|Motorized Stage Alignment Unit
(5-Axis)E5222
Product ExplanationUnit that incorporates a motorized stage on the 3 linear XYZ axes and the rotation axis (θz) in the direction of the optical axis.
Option
Stroke type
L/R type
Travel distance X[mm]
Travel distance Y[mm]
Travel distance Z[mm]
Relevant product
Spec List
ES5202-L Motorized Stage Alignment Unit
(5-Axis):E5202
X:30mm/Y:20mm/Z:70mm/θxy:±8° Left type 6.6 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
30 20 70 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 2D 3D
ES5202-R Motorized Stage Alignment Unit
(5-Axis):E5202
X:30mm/Y:20mm/Z:70mm/θxy:±8° Right type 6.6 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
30 20 70 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 2D 3D
ES5212-L Motorized Stage Alignment Unit
(5-Axis):E5212
X:70mm/Y:20mm/Z:70mm/θxy:±8° Left type 7 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
70 20 70 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 2D 3D
ES5212-R Motorized Stage Alignment Unit
(5-Axis):E5212
X:70mm/Y:20mm/Z:70mm/θxy:±8° Right type 7 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
70 20 70 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 2D 3D
ES5222-L Motorized Stage Alignment Unit
(5-Axis)E5222
X:70mm/Y:20mm/Z:100mm/θxy:±8° Left type 7.3 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
70 20 100 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 2D 3D
ES5222-R Motorized Stage Alignment Unit
(5-Axis)E5222
X:70mm/Y:20mm/Z:100mm/θxy:±8° Right type 7.3 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
70 20 100 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032 2D