Motorized Stage Alignment Unit
【End of production】Motorized stage Alignment unit(5axis):ES5201/ES5211/ES5221
Model configuration/Option code
Dimensions
Spec
Product nameMotorized Stage Alignment Unit
(5-Axis):E5201|Motorized Stage Alignment Unit
(5-Axis):E5211|Motorized Stage Alignment Unit
(5-Axis):E5221
Product ExplanationUnit that incorporates a motorized stage on the 3 linear XYZ axes and the rotation axis (θz) in the direction of the optical axis.
Option
Stroke type
L/R type
Travel distance X[mm]
Travel distance Y[mm]
Travel distance Z[mm]
Relevant product
Spec List
ES5201-L Motorized Stage Alignment Unit
(5-Axis):E5201
X:30mm/Y:20mm/Z:70mm/θxy:±8° Left type 6.6 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
30 20 70 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032
ES5201-R Motorized Stage Alignment Unit
(5-Axis):E5201
X:30mm/Y:20mm/Z:70mm/θxy:±8° Right type 6.6 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
30 20 70 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032
ES5211-L Motorized Stage Alignment Unit
(5-Axis):E5211
X:70mm/Y:20mm/Z:70mm/θxy:±8° Left type 7 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
70 20 70 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032
ES5211-R Motorized Stage Alignment Unit
(5-Axis):E5211
X:70mm/Y:20mm/Z:70mm/θxy:±8° Right type 7 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
70 20 70 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032
ES5221-L Motorized Stage Alignment Unit
(5-Axis):E5221
X:70mm/Y:20mm/Z:100mm/θxy:±8° Left type 7.3 189 Stage cable
(D214-2-2E 3 pcs/D214-1-2E 2 pcs)

Mounting screw
(Hexagon socket head bolt M6-12 4 pcs)
70 20 100 8 8 1 0.05 1 0.05 1 0.05 0.003 0.0032