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TEL:0120-789-446　FAX:0120-789-449

Motorized Stage Alignment Unit

Motorized Stage Alignment Unit(3-Axis)
:ES3701

Model configuration/Option code

Dimensions

Spec

Product name	Motorized Stage Alignment Unit (3-Axis) :ES3701
Product Explanation	Unit that incorporates a motorized stage on the XYZ axes. Posture adjustment in the tilt direction (θxθy) can also be performed using the manual axis.

Option

L/R type

Left type

Right type

Travel distance X[mm]

Travel distance Y[mm]

Travel distance Z[mm]

Relevant product

Spec List

preview

Model	Product name	L/R type	Weight[kg]	Optical axis height [mm]	Accessory	Travel distance X[mm]	Travel distance Y[mm]	Travel distance Z[mm]	Travel distance: θx[±°]	Travel distance: θy[±°]	Resolution : X[μm/Pulse](Full)	Resolution : X[μm/Pulse](MS1/20)	Resolution : Y[μm/Pulse](Full)	Resolution : Y[μm/Pulse](MS1/10)	Resolution : Z[μm/Pulse](Full)	Resolution : Z[μm/Pulse](MS1/20)	Resolution : θx[°/Rotation]	Resolution : θy[°/Rotation]	CAD	Qty	Estimate
ES3701-L	Motorized Stage Alignment Unit (3-Axis) :ES3701	Left type	5.5	160	Stage cable (D214-2-2E x 3) Mounting screw (Hex socket head bolt M6-12 x 4)	50	10	50	2.5	2.5	1	0.05	0.5	0.05	1	0.05	Approx. 0.58	Approx. 0.57
ES3701-R	Motorized Stage Alignment Unit (3-Axis) :ES3701	Right type	5.5	160	Stage cable (D214-2-2E x 3) Mounting screw (Hex socket head bolt M6-12 x 4)	50	10	50	2.5	2.5	1	0.05	0.5	0.05	1	0.05	Approx. 0.58	Approx. 0.57

SURUGA SEIKI Co,Ltd.