SURUGA SEIKI CO., LTD.

Model	Product name	Overhang option	Tilt Stage type	L/R type	Weight[kg]	Optical axis height [mm]	Accessory	Travel distance X[±mm](Coarse motion)	Travel distance X[±mm](Fine motion)	Travel distance Y[±mm](Coarse motion)	Travel distance Y[±mm](Fine motion)	Travel distance Z[±mm](Coarse motion)	Travel distance Z[±mm](Fine motion)	Travel distanceθx[±°]	Travel distanceθy[±°]	Resolution : X [μm/scale](Coarse motion)	Resolution : X [μm/scale](Fine motion)	Resolution : Y-Axis [μm/scale](Coarse motion)	Resolution : Y-Axis [μm/scale](Fine motion)	Resolution : Z-Axis [μm/scale](Coarse motion)	Resolution : Z-Axis [μm/scale](Fine motion)	Resolution : θx[″/scale]	Resolution : θy[″/scale]	CAD	Qty	Estimate
E2000A-L	Manual Stage Alignment Unit (5-Axis):E2000	None	Inner tilt	Left type	2.1	130	Mounting screw (Hexagon socket bolts M6-12 x 4)	6.5	0.3	6.5	0.3	6.5	0.3	3	3	10	0.5	10	0.5	10	0.5	33.8	33.4
E2000A-R	Manual Stage Alignment Unit (5-Axis):E2000	None	Inner tilt	Right type	2.1	130	Mounting screw (Hexagon socket bolts M6-12 x 4)	6.5	0.3	6.5	0.3	6.5	0.3	3	3	10	0.5	10	0.5	10	0.5	33.8	33.4
E2000B-L	Manual Stage Alignment Unit (5-Axis):E2000	None	Outer tilt	Left type	2.1	130	Mounting screw (Hexagon socket bolts M6-12 x 4)	6.5	0.3	6.5	0.3	6.5	0.3	2.5	2.5	10	0.5	10	0.5	10	0.5	29.3	27.8
E2000B-R	Manual Stage Alignment Unit (5-Axis):E2000	None	Outer tilt	Right type	2.1	130	Mounting screw (Hexagon socket bolts M6-12 x 4)	6.5	0.3	6.5	0.3	6.5	0.3	2.5	2.5	10	0.5	10	0.5	10	0.5	29.3	27.8
E2000WA-L	Manual Stage Alignment Unit (5-Axis):E2000	Overhang type	Inner tilt	Left type	2.1	130	Mounting screw (Hexagon socket bolts M6-12 x 4)	6.5	0.3	6.5	0.3	6.5	0.3	3	3	10	0.5	10	0.5	10	0.5	33.8	33.4
E2000WA-R	Manual Stage Alignment Unit (5-Axis):E2000	Overhang type	Inner tilt	Right type	2.1	130	Mounting screw (Hexagon socket bolts M6-12 x 4)	6.5	0.3	6.5	0.3	6.5	0.3	3	3	10	0.5	10	0.5	10	0.5	33.8	33.4
E2000WB-L	Manual Stage Alignment Unit (5-Axis):E2000	Overhang type	Outer tilt	Left type	2.1	130	Mounting screw (Hexagon socket bolts M6-12 x 4)	6.5	0.3	6.5	0.3	6.5	0.3	2.5	2.5	10	0.5	10	0.5	10	0.5	29.3	27.8
E2000WB-R	Manual Stage Alignment Unit (5-Axis):E2000	Overhang type	Outer tilt	Right type	2.1	130	Mounting screw (Hexagon socket bolts M6-12 x 4)	6.5	0.3	6.5	0.3	6.5	0.3	2.5	2.5	10	0.5	10	0.5	10	0.5	29.3	27.8

Product name	Manual Stage Alignment Unit (5-Axis):E2000
Product Explanation	5-axis unit with high-resolution manual stage (XYZ) and tilt stage (θxθy)

SURUGA SEIKI Co,Ltd.