
| Stage surface size | 60×60mm |
| Travel distance[mm] | 20 |
| Load capacity[kgf] | 3 |
| Guide | Linear Ball Guide |
| Cover | None |
| Ball screw φ diameter -Lead [mm] | φ8 Lead 1 |
| Motorless: Applicable size | □28 Stepping motor specification |□38 Servo motor specification|□40 Servo motor specifications |
| Main material | Special Steel Electroless nickel plating |
| Single axis accuracy specification Repeatability positioning accuracy [Within ±μm] | 0.5 |
| Single axis accuracy specification Straightness[Withinμm] | 3 |