
| Stage surface size | 180×180mm |
| Travel distance[mm] | 200 |
| Load capacity[kgf] | 10 |
| Guide | Slide Guide |
| Main material | Aluminum -Black alumite finishing |
| MAX Speed [mm/sec] | 30~200 |
| Single axis accuracy specification Repeatability positioning accuracy [Within ±μm] | 1 |
| Single axis accuracy specification Straightness[Withinμm] | 15 |