Stage surface size | 180×180mm |
Travel distance[mm] | 100 |
Load capacity[kgf] | 10 |
Guide | Slide Guide |
Main material | Aluminum -Black alumite finishing |
MAX Speed [mm/sec] | 30~200 |
Single axis accuracy specification Repeatability positioning accuracy [Within ±μm] | 1 |
Single axis accuracy specification Straightness[Withinμm] | 10 |