Stage surface size | 60×60mm |
Travel distance[mm] | 20 |
Load capacity[kgf] | 3 |
Guide | Linear Ball Guide |
Main material | Special Steel -Electroless nickel plating |
MAX Speed [mm/sec] | 20~50 |
Single axis accuracy specification Repeatability positioning accuracy [Within ±μm] | 0.5 |
Single axis accuracy specification Straightness[Withinμm] | 3 |