Model
Product name
Power supply
External Dimensions (Controller)
Weight (Controller)
Number of controlled axis
Motor control method
Alignment Software
Analog input for alignment
Communication interface
User interface
External Dimensions (Stage)
Weight (Stage)
Travel distance X[mm]
Travel distance Y[mm]
Travel distance Z[mm]
Travel distance: θx[±deg]
Travel distance: θy[±deg]
Travel distance: θz[±deg]
Resolution:X[μm/Pulse]
Resolution:Y[μm/Pulse]
Resolution:Z[μm/Pulse]
Resolution:θx[°/Pulse](Full)
Resolution:θy[°/Pulse](Full)
Resolution:θz[°/Pulse](Full)
Accessory
Features
※
CAD
Qty
Estimate
EW51
EW51-XX 12-axis Controller & Stages Set(with Contact Sensor)
AC 100~240V +/- 10%、50/60Hz、Max650VA
External Dimensions: 430(W) x 462.3(D) x 231.5(H) mm(Including jut)
17.4kg
maximum 12 axes
Closed-loop control
XY alignment (FLAT), XYZ alignment (FOCUS), XYθZ alignment (ROTATE, LOOPBACK)
DC 0-10V, 4 channels
Ethernet for Host Controller PC Ethernet/RS232C/USB for external power meter
HDMI port for monitor output USB port for keyboard/mouse/touch-screen I/F
300.4(W)×264(D)×206(H)㎜(Including jut)
6.7kg/unit
50
10
50
6
8
8
0.01
0.005
0.01
0.000128
0.000156
0.000167
・ Motor cable x 6 ・ Encoder cable x 6 ・ High resolution Motor cable x 6 ・ High resolution Encoder cable x 6 ・ Sensor cable x 12 ・ Power supply cable x 1 ・ Contact Sensor(L/R)for stage 1pc ・ Amplifier for contact sensor 1pc ・ mounting bolts with hexagon socket for stage( Nominal diameter M6 length 12 mm 8 pieces)]
EW51 is equipped with a contact sensor to achieve contact sensing and surface alignment functions. This product is a combination of a left and right 6-axis automatic stage unit and a 12-axis controller that can optimally automatically align to prevent damage to waveguides such as SiP and FA during alignment. It is also possible to provide an arbitrary gap between FA and SiP by contact sensor. The software that supports loopback alignment installed in the EW50 is still installed.
1)* EW51-XX: XX are regional models. 2) CAD data will be sent separately upon request. 3) The controller and stage are set up to be used in pairs. It cannot be used in other our standard stages. 4) We will contact you separately for the instruction manual.